Let's look at a high vacuum chamber and all the associated components ==== Timeline ==== 0:00 Intro 1:10 Roughing pump 3:22 Control electronics 3:50 Valves, gas inlets 5:29 Turbomolecular pump 8:14 ...
Abstract: Magnetically suspended turbomolecular pumps (MSTMPs) are key devices for achieving clean ultra-high vacuum (UHV). Due to their high speed, compact size, and significant levels of current ...