Abstract: This letter introduces a micro-electromechanical system (MEMS) resonant pressure gauge based on aluminum nitride piezoelectric resonators that can operate in an atmospheric environment. The ...
Jason Fernando is a professional investor and writer who enjoys tackling and communicating complex business and financial problems. Natalya Yashina is a CPA, DASM with over 12 years of experience in ...
Abstract: A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts ...
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