Abstract: In advanced CMOS technology nodes with Cu/low-k interconnect, metal hard-mask approach AIO etch is the key process to define the physical structure of Cu line and via. The via hole and via ...
Will Kenton is an expert on the economy and investing laws and regulations. He previously held senior editorial roles at Investopedia and Kapitall Wire and holds a MA in Economics from The New School ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback