Laser-produced plasmas are plasmas produced by firing high-intensity beams of light. Laser-produced plasmas have been used to create short bursts of x-rays and to accelerate particles — so-called ...
The development of laser–plasma accelerators began in the early 1980s, inspired by the pioneering work of Tajima and Dawson 1. Key to their operation is the fact that unlike the superconducting ...
Abstract: This paper presents design and implementation of remote-plasma-source (RPS) generator for semiconductor manufacturing chamber cleaning. The generator consists of a full-bridge resonant ...
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