Department of Bioproducts and Biosystems, School of Chemical Engineering, Aalto University, Kemistintie 1, Espoo 02150, Finland Academy of Finland Center of Excellence in Life-Inspired Hybrid ...
Abstract: This article reports the time-dependent dielectric breakdown (TDDB) reliability of zirconia (ZrO2)-based MIM capacitors with sub-0.7-nm equivalent oxide thicknesses (EOT). Results indicate ...
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