Abstract: This article proposes a single-axis, highperformance Complementary Metal Oxide Semiconductor- Microelectromechanical System (CMOS-MEMS) closed-loop accelerometer, implemented using in-plane ...
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Abstract: This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed and fabricated a microfabircated Clark-type ...
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