Abstract: A high-sensitivity sapphire extrinsic Fabry-Perot (FP) interferometer (EFPI) is proposed for the high-resolution pressure measurement in high temperature vacuum environment. A composite FP ...
Abstract: A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts ...
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