Abstract: This letter introduces a micro-electromechanical system (MEMS) resonant pressure gauge based on aluminum nitride piezoelectric resonators that can operate in an atmospheric environment. The ...
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The global cordless vacuum cleaner market was US$ 5,780.32 million in 2021. The global cordless vacuum cleaner market is forecast to grow to US$ 12736.98 million by 2030 by growing at a compound ...
Abstract: A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts ...
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