Abstract: The design of RF MEMS switches is a challenging task due to the various multiphysics coupled phenomena that have to be taken into consideration. In order to reach a configuration with ...
Abstract: We employ COMSOL Multiphysics to develop and analyze a novel tri-layered MEMS-based capacitive pressure sensor. The sensor comprises gold electrodes, a composite dielectric layer consisting ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback